Free vibration of axially loaded microbeam in MEMS based on sinusoidal shear deformation theory
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Free vibration of a silicon microbeam in micro-electromechanical systems (MEMS) subjected to electrostatic and axial forces is studied in the framework of a sinusoidal shear deformation theory. A nonlinear finite element formulation based on the von Kármán nonlinear assumption and the modified couple stress theory (MCST) is formulated and employed to establish the discrete nonlinear governing equations for the microbeam.
Nội dung trích xuất từ tài liệu:
Free vibration of axially loaded microbeam in MEMS based on sinusoidal shear deformation theory
Nội dung trích xuất từ tài liệu:
Free vibration of axially loaded microbeam in MEMS based on sinusoidal shear deformation theory
Tìm kiếm theo từ khóa liên quan:
Sinusoidal theory Free vibration Micro-electromechanical systems Axial forces Modified couple stress theoryGợi ý tài liệu liên quan:
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