Micro Electronic and Mechanical Systems
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The miniaturization and performance improvement in semiconductor devices and
integrated circuits (ICs) are expected to continue through leveraging of nanotechnologies and
nanomaterials. This evolution should accelerate the System-on-a-Chip (SoC) trend, i.e., singlechip
integration of multifunctional, mixed-signal electronic components, toward realizing
embedded nanoelectronic systems. In parallel with advances in electronics, we are witnessing
the rise of micro-electro-mechanical systems (MEMS), with rapidly growing commercial
opportunities and markets extending to a broader range of industrial sectors on a global scale....
Nội dung trích xuất từ tài liệu:
Micro Electronic and Mechanical Systems
Nội dung trích xuất từ tài liệu:
Micro Electronic and Mechanical Systems
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Non-contact Measurement Thickness Uniformity Machining Technologies Reliability of MEMS Numerical Simulation Experimental StudiesTài liệu liên quan:
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